Capacitor formed in insulated pores of an anodized metal layer

ABSTRACT

A Metal-Insulator-Metal type capacitor structure ( 1 ) comprising a substrate ( 2 ), a first electrically insulating layer ( 14 ) placed on the substrate ( 2 ), a lower electrode ( 6 ) placed on the first insulating layer ( 14 ), a layer of structured metal ( 12 ) comprising a plurality of pores disposed on the lower electrode ( 6 ), a MIM capacitor ( 4 ) comprising a first conductive layer ( 18 ) placed on the structured metal layer ( 12 ) in contact with the lower electrode ( 6 ) and inside the pores, a dielectric layer ( 20 ) covering the first conductive layer ( 18 ), a second conductive layer ( 24 ) covering the dielectric layer ( 20 ) in contact with an upper electrode ( 8 ) placed on the MIM capacitor ( 4 ) and a second electrically insulating layer ( 16 ) placed on the upper electrode ( 8 ).

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a National Stage entry of International ApplicationNo. PCT/FR2014/052754, filed on Oct. 29, 2014, which claims priority toFrench Application No. 1360555, filed on Oct. 29, 2013, the contents ofeach of these priority applications are hereby incorporated by referencein their entirety.

TECHNICAL FIELD

The present invention generally relates to Metal-Insulator-Metalcapacitance. More specifically, the invention relates to a structurewith a Metal-Insulator-Metal type capacitance from which a stack ofMetal-Insulator-Metal type capacitors can be made.

The invention finds applications, in particular, in the field ofmicroelectronics and more specifically in the field of passive and/oractive components used for example in medical devices, in energymanagement devices or else in avionics.

BACKGROUND

Thanks to technological developments in microelectronics, it is nowpossible to integrate several complex functions on the same component toimprove its performance. The integration of passive components and, morespecifically, capacitors in integrated active or passive circuits is animportant issue for developers. In fact, during the integration of suchcomponents, technological compatibility problems arise between theprocesses for manufacturing capacitors, for example, and passive oractive components. In addition, storage requirement problems connectedto the use of high-value capacitors arise.

Solutions have been explored, such as for example, the creation ofMetal-Insulator-Metal (MIM) capacitors with anodizable layers enablingMIM deposition to be done inside holes obtained in said anodized layer.

Thus for example, a process enabling an MIM capacitor to be producedusing an anodized layer is proposed in the NATURE TECHNOLOGY publicationof May 2009, “Nanotubular metal-insulator-metal capacitor arrays forenergy storage” by P. Banerjee et al. This publication presents a methodof etching by anodizing an anodizable layer, enabling an MIM capacitorstructure to be created. The MIM capacitors thus created enablecapacitance values to be controlled in a relatively accurate way.However, such structures have relatively high internal resistance, whichdegrades the performance of such components and limits their integrationin active circuits.

In addition, despite relatively high area ratios, thanks to the use ofanodized layers, the densities of MIM capacitors thus obtained remainrelatively low. Consequently, during the design of high-valuecapacitors, space requirement problems associated with this type oftechnology arise.

SUMMARY

The invention aims to overcome the aforementioned disadvantages from theprior art and, more specifically, aims to enable the production of aMetal-Insulator-Metal type capacitor structure with low accessresistance.

Advantageously, a capacitor structure according to the invention willenable a structure with a limited footprint resulting in highintegration capability to be obtained.

Preferably, a structure according to the invention will be easilyattainable and/or will have a low cost. It may advantageously beintegrated into a structure comprising active circuits.

For this purpose, the invention proposes a Metal-Insulator-Metal typecapacitor structure comprising:

-   -   a substrate,    -   a first electrically insulating layer placed on the substrate,    -   a lower electrode placed on the first electrically insulating        layer,    -   a layer of metal placed on the lower electrode and structured by        a plurality of pores to form a pore insulating matrix,    -   a Metal-Insulator-Metal type capacitor comprising a first        conductive layer placed on the structured metal layer and inside        the pores of said structured metal layer, a dielectric layer        covering the first conductive layer, a second conductive layer        covering the dielectric layer, each relevant pore comprising the        first conductive layer and the second conductive layer separated        by the dielectric layer.    -   an upper electrode placed on the Metal-Insulator-metal type        capacitor,    -   a second electrically insulating layer placed on the upper        electrode.

According to the invention, the first conductive layer situated insidethe pores of the structured metal layer is in contact with the lowerelectrode and the second conductive layer situated inside the pores ofthe structured metal layer is in contact with the upper electrode.

The invention thus proposes an original capacitor structure of theMetal-Insulator-Metal type enabling, thanks to the presence of the lowerelectrode, the conductive layer situated inside the pores to beshort-circuited and thus a capacitor structure of theMetal-Insulator-Metal type with low resistance to be obtained.

It is noted that in this structure, the pores of the structured metallayer are electrically insulated by a peripheral oxide layer from therest of the structured metal layer in which they are produced. Thisoxide layer which forms a pore insulating matrix is created when thepores are produced in a layer of metal in order to form the structuredmetal layer. Thus, when the metal constituting the metal layer isaluminum, the oxide layer is a layer of alumina.

One advantageous embodiment of the invention proposes aMetal-insulator-Metal type capacitor structure comprising at least onelateral insulation strip placed in the lower electrode and dividing thelower electrode into two electrically distinct areas, at least onelateral insulation strip placed in the upper electrode that divides theupper electrode into two electrically distinct areas, and a furtherelectrical contact from the lower electrode being arranged up to thelevel of the upper electrode by the structured metal layer.

Thanks to the combination of, first, pores of a porous structure openingonto a lower electrode and, second, the presence of lateral insulationstrips, a structure enabling parallel-connected capacitors to be stackedis produced, which substantially allows the capacitance value for agiven surface unit to be increased.

One advantageous embodiment of the invention provides that the lowerelectrode comprises a metal layer and an etch barrier layer. In thisway, the etch barrier layer protects the metal layer when pores are madein the structured metal layer. The etch barrier layer may be, forexample, deposited by Physical Vapor Deposition (PVD) or by Atomic LayerDeposition (ALD) and thus is very thin. Also, if its conductivity is lowby its very nature (TiN, TaN), it will, however, be resistive to theflow of charges parallel to the etch barrier layer and/or over largedistances. It is thus preferable to short-circuit this etch barrierlayer to obtain good performance in terms of series resistance (ESR).This short-circuit is done by the metal layer integrated into the lowerelectrode. This structure corresponds to a particularly advantageouscharacteristic of the invention.

The lateral insulation strips are preferentially constituted of aninsulating material selected, for example, from silicon oxide andsilicon nitride in order to insulate the electrodes of theMetal-Insulator-Metal type capacitor two-by-two. This material ispreferably deposited at low temperature, for example by a PECVD typeprocess.

The invention proposes a preferred embodiment in which themetal-Insulator-Metal type capacitor is made in a structured metal layercomprised of a metal with a thickness of more than 0.4 μm, enablingcavities such as “deep” micropores or nanopores to be made and thusenabling the total equivalent surface (TES) of the capacitor to beincreased.

In a Metal-Insulator-Metal type capacitor structure such as describedhere, the pore insulating matrix is a matrix obtained by anodic etchingor by anodization.

In one example of embodiment, the structured metal layer is out ofaluminum, and the pore insulating matrix is out of alumina.

In order to increase the density of the Metal-Insulator-Metal typecapacitor, the dielectric layer placed between the two metal layers isadvantageously comprised of an insulating material with a high-kdielectric constant, greater than 4 and preferentially greater than 10(k>10).

Thanks to the use of a lower electrode as well as upper and lowerlateral insulation strips, the Metal-Insulator-Metal type capacitorstructure enables several Metal-Insulator-Metal type capacitors to bestacked one on top of the other. This stack enables the capacitancevalue of the structure, and thereby the capacitance value in relation tothe constant equivalent surface, to be increased, thus enabling theintegration of such a structure according to the invention to beimproved. Two Metal-Insulator-Metal type capacitors of the stack areadvantageously electrically coupled in parallel, which advantageouslyenables the capacitance values to be added to obtain high values with aconstant footprint.

For the sake of simplification of the technological process, such aMetal-Insulator-Metal type capacitor structure according to theinvention has a Metal-Insulator-Metal type capacitor of the stackelectrically connected first by its upper electrode to the upperelectrode of another Metal-Insulator-Metal type capacitor situated aboveit, and second by its lower electrode to the lower electrode of anotherMetal-Insulator-Metal type capacitor situated above it. This stackcorresponds to a particularly advantageous characteristic of theinvention.

According to a second aspect, the invention relates to a passive oractive semiconductor product or device comprising at least oneMetal-Insulator-Metal type capacitor as described above.

According to a third aspect of the invention, a process to manufacturesuch a structure is proposed, which comprises:

-   -   a. preparing a substrate,    -   b. deposition of a first electrically insulating layer of an        insulating material on the substrate,    -   c. producing a lower electrode placed on the first electrically        insulating layer and comprising an etch barrier layer at its        surface,    -   d. depositing an electrically insulating material in the        localized etching of the lower electrode,    -   e. depositing a metal layer on the lower electrode,    -   f. structuring pores in the metal layer preferentially by using        an anodic etching process to form a pore insulating matrix,    -   g. successively depositing a first conductive layer, a        dielectric layer and a second conductive layer on the structured        metal layer and in the pores of said structured layer,    -   i. producing an upper electrode placed on the second conductive        layer,    -   j. depositing an electrically insulating material in the        localized etching of the upper electrode,    -   k. depositing a second electrically insulating layer of an        insulating material on the upper electrode.

Such a process enables a Metal-Insulator-Metal type capacitor structuresuch as described above to be produced.

In one embodiment, the structured metal layer is out of aluminum, andthe pore insulating matrix is out of alumina.

It may be expected that the lower electrode produced in step c) is madeby depositing a layer of metal on the first electrically insulatinglayer, said metal layer then being covered by an etch barrier layer.

To then enable a stack of Metal-Insulator-Metal type capacitors, theproduction process according to the invention also advantageouslyproposes the steps of:

c1) producing a lower lateral insulation strip by localized etching ofthe electrode defining two electrically insulated areas in the lowerelectrode after the production of said lower electrode, and

h1) producing an upper lateral insulation strip by localized etching ofthe electrode defining two electrically insulated areas in the upperelectrode after the production of said upper electrode.

An advantageous form of embodiment of the invention proposes aproduction process in which steps c), c1), d) to h) and h1) of theproduction process above are repeated N times.

In order to reduce topographical discontinuities, deposition of aplanarization layer after at least one step h1) of the process, i.e.,between two Metal-Insulator-Metal type capacitors of the stack, isprovided.

BRIEF DESCRIPTION OF THE DRAWINGS

Other characteristics and advantages of the invention will appear uponreading the following description. The description is purelyillustrative and should be read in conjunction with the appendeddrawings, in which:

FIG. 1 is a cross-sectional view of an example of a MIM type capacitorstructure according to an embodiment of the invention;

FIGS. 2 to 8 represent the steps of a technological process according tothe invention;

FIG. 9 is a schematic cross-sectional view of an example of a MIM typecapacitor structure according to the invention;

FIG. 10 is a schematic cross-sectional view of a stack of two MIM typecapacitors in a MIM type capacitor structure according to the invention.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS

First, it should be noted that all figures illustrating thecross-sectional views of the capacitor structure as well as all figuresillustrating the stacks of layers but also those representing the stepsof the structure production process are not to scale. In addition, thedifferent thicknesses are not realistically represented. For the sake ofsimplification, in the description and in the figures, elements that arecommon to all structures bear the same references.

The invention will be more specifically described in a non-limitingexample of a Metal-Insulator-Metal type capacitor structure applicationthat will subsequently be called in the rest of the description a MIMtype capacitor structure. The MIM type capacitor structure exampledescribed below comprises a structured layer and more specifically alayer of nanostructured metal comprising a plurality of nanopores with adiameter d. The pores from the following description are nanopores butthe invention can also be applied to a structure comprising pores withother dimensions, for example, micropores.

The metal layer may be in a metal such as for example aluminum (Al) witha thickness on the order of a micrometer (1 μm=10-6 m). Thetechnological process enabling nanopores to be created in the metallayer will preferentially be a process using the anodic etchingtechnique. The anodic etching process will be presented more preciselyin the rest of the description.

The invention applies to a MIM type capacitor structure 1 comprising alower electrode 6, a nanostructured layer 12, a MIM type capacitor 4deposited on the nanostructured layer 12, said MIM type capacitor 4comprising a first conductive layer 18 situated inside the pores of thenanostructured metal layer 12 and which is in contact with the lowerelectrode 6, a dielectric layer 20 and a second conductive layer 24situated inside the pores of the nanostructured metal layer 12 and whichis in contact with an upper electrode 8.

FIG. 1 shows a first example of a stack of layers constituting the MIMtype capacitor structure 1. The figure comprises, in ascending order ofthe stack:

-   -   a substrate 2,    -   the first electrically insulating layer 14,    -   the lower electrode 6 composed of a metal layer 28 and an etch        barrier layer 10,    -   the nanostructured metal layer 12,    -   the MIM type capacitor 4 comprising the first conductive layer        18, the dielectric layer 20 and the second conductive layer 24,    -   the upper electrode 8,    -   a second electrically insulating layer 16.

The MIM type capacitor structure 1 represented in FIG. 1 also comprisesa lower lateral insulation strip named BLII and an upper lateralinsulation strip called BLIS. The upper and lower lateral insulationstrips are sized to surround the MIM capacitor structure 1. As FIG. 1 isa cross-sectional view of said MIM type capacitor structure 1, two partsof the lower lateral insulation strip and two parts of the upper lateralinsulation strip appear in the figure.

Lower lateral insulation strip BLII is placed between MIM type capacitor4 and the first electrically insulating layer 14. It divides the lowerelectrode 6 into several electrically distinct areas in order to obtainelectrical insulation between the first conductive layer 18 and thesecond conductive layer 24 of the MIM type capacitor 4.

The first electrically insulating layer 14 placed above substrate 2 andbelow lower electrode 6 enables the MIM type capacitor 4 of substrate 2which may be, for example, a silicon wafer or an active circuit, to beelectrically insulated. In fact, for the sake of optimizing andintegrating the components on a silicon wafer, it is advantageous toelectrically insulate the MIM type capacitor structure 1 in order to,first, not degrade its performance and, second, not influence, by itspresence, the other components placed around it.

The upper lateral insulation strip BLIS (FIG. 1) divides the upperelectrode 8 into several electrically distinct areas in order to obtainelectrical insulation between the first conductive layer 18 and thesecond conductive layer 24 of the MIM type capacitor 4. The upperlateral insulation strip and the lower lateral insulation strip thusenable a MIM type capacitor structure 1 with a limited footprint andalso with access electrodes that are electrically insulated from eachother to be obtained, advantageously enabling several MIM type capacitorstructures to be stacked on one another.

In another embodiment, not represented in the drawings, an original MIMtype capacitor structure 1 is proposed, which enables without thepresence of lower lateral insulation strips in the lower electrode 6 andwithout the presence of upper lateral insulation strips in the upperelectrode 8, a MIM type capacitor structure 1 with low resistance to beobtained. The lower electrode 6 short-circuits the first conductivelayer 18 at the bottom of each pore of the nanostructured metal layer12, thus enabling a MIM type capacitor structure 1 with low resistanceto be obtained.

The invention also proposes a process for producing the MIM typecapacitor structure 1 of FIG. 1. This process comprises:

-   -   preparation of the substrate 2,    -   deposition of an insulating material to form the first        electrically insulating layer 14,    -   production of the lower electrode 6 placed on the first        electrically insulating layer 14 by first depositing the metal        layer 28 and then the etch barrier layer 10 above said metal        layer,    -   production of the lower lateral insulation strip by localized        etching of the lower electrode 6 defining electrically insulated        areas within it,    -   deposition of an electrically insulating material in the        localized etching of the lower electrode,    -   deposition of a metal layer on the lower electrode 6,    -   structuration of nanopores giving rise to an electrically        insulating layer at the periphery of the pores named the pore        insulating layer 121 in the layer of metal deposited on the        lower electrode 6 preferentially using an anodic etching process        to produce a layer of nanostructured metal 12,    -   successive depositions of the first conductive layer 18, a        dielectric layer 20 and the second conductive layer 24 on the        nanostructured metal layer 12 and in the nanopores of said        layer,    -   production of an upper electrode 8 placed on the second        conductive layer 24,    -   production of the upper lateral insulation strip by localized        etching of the upper electrode 8 defining electrically insulated        areas within it,    -   deposition of an electrically insulating material in the        localized etching of the upper electrode 8 thus forming the        upper lateral insulation strip,    -   deposition of an insulating material on upper electrode 8 to        form the second electrically insulating layer.

Here the structured metal layer is for example in aluminum, and theinsulating matrix obtained by anodization is in alumina.

Several types of materials can be used to make substrate 2 as a supportfor the MIM type capacitor structure 1. Silicon (Si), which ispredominantly used in the microelectronics industry particularly for itscost as well as for its semiconductive characteristics enabling activeor passive components to be made, can be a substrate of choice for sucha structure. However, it should be noted that other types of substratescan be used, such as for example, silicon carbide (SiC) substrates orsilica substrates. It should be noted that the present invention isparticularly adapted to a substrate on which active components havealready been implanted.

Due to its positioning, the first electrically insulating layer 14 (FIG.2) enables the electrical couplings between the MIM type capacitorstructure 1 and the substrate 2 to be controlled. The material used tomake this first electrically insulating layer 14 must have a relativelylow electric permittivity k in order to reduce the noise induced by thepresence of the wafer, for example. Several types of insulatingmaterials with dielectric permittivity (k on the order of 4 for example)can be used, such as for example silicon oxide or silicon nitride(Si3N4). In addition, the materials used must be compatible with thetechnological processes used to produce the MIM type capacitor structure1 according to the invention.

Lower electrode 6, characterized by a surface surf_e/e/_inf and athickness e_lec_inf, is placed on the first electrically insulatinglayer 14 (Figure No, 3). It is composed of the metal layer 28 and theetch barrier layer 10 placed over the metal layer 28. The metal layer 28may have a thickness e_CM28 for example of between 1 μm and 5 μm. Inaddition, lower electrode 6 may comprise other layers, not representedin FIG. 3. They may, for example, be inserted between the firstelectrically insulating layer 14 and the metal layer 28 to improveadhesion between these two layers. Lower electrode 6 may also onlycomprise a single layer such as for example the etch barrier layer 10.

The materials used to create the metal layer 28 may be for examplealuminum (Al), copper (Cu), silver (Ag) combined or not combined withbarrier metals such as for example titanium (Ti), titanium nitride(TiN), tantalum (Ta) or tantalum nitride (TaN). As this list is notexhaustive, other materials, alone or in combination with othermaterials, can be deposited according to a deposition process that iscompatible with the process for producing the MIM type capacitorstructure 1 and preferably having an equivalently low electricalresistivity.

The etch barrier layer 10 (FIG. 3) of the lower electrode 6 presents athickness e_bar_grav and acts to stop the attack of the metal layerplaced on the lower electrode 6 during anodic etching to give rise tothe nanostructured metal layer 12, as will be subsequently presented inthe rest of the description. The thickness e_bar_grav must be sufficientto tolerate the overetch necessary for the complete opening of nanoporeson said etch barrier layer 10. The thickness e_bar_grav of the etchbarrier layer 10 is on the order of 1 μm, for example. A process forproducing nanopores will be described in further detail later.

To ensure electrical continuity between the first conductive layer 18 ofthe MIM type capacitor 4 and the lower electrode 6, said etch barrierlayer 10 must have a sufficiently low electrical resistivity. To dothis, said etch barrier layer 10 may be for example in a metal of thetitanium (Ti), tantalum (Ta), titanium nitride (TiN) or tantalum nitride(TaN) type. Other anodization-resistant materials having the lowestpossible electrical resistivity can be used. In addition, the type ofmaterial used to make this etch barrier layer 10 must be compatible withthe anodic etching process. This compatibility results in a sufficientselectivity of the etching process used to open pores after anodizationon said barrier layer 10.

The process of producing the MIM type capacitor structure 1 according tothe invention enables a structure with a small footprint to be obtained.To do this, a lower lateral insulation strip BLII is made. To do this, aphotolithography step enables continuous trenches to be made in the etchbarrier layer 10 and metal layer 28. These trenches define the contourof the first conductive layer 18 and the second conductive layer 24,dividing the lower electrode 6 into three distinct areas. The widthI_BLII of this trench (FIG. 5) is for example on the order of thecumulative thickness of the etch barrier layer 10 and the metal layer 28corresponding to dimension e_BLII. An electrically insulating layer isthen deposited over the etched structures. The thickness e_BLII_2 ofthis insulating layer may be thin such that only the sides of openingI_BLII are covered, or on the contrary, may be sufficiently thick sothat a cover for the opening is made, this second case being representedin FIGS. 5 and 6. Lateral insulation strips are then made in a mannerknown to the person skilled in the art who knows how to obtain a coverwith a width I_BLI1_2 after etching (FIG. 5).

The lower lateral insulation strips BLII are constituted of anelectrically insulating material such as for example silicon nitride(Si3N4) deposited by using a PECVD type deposition method. Othermaterials as well as other deposition methods can be used. However,compatibility with the process for producing the MIM type capacitorbased structure 1 is necessary.

A cover 141 situated on an upper part of the lower lateral insulationstrip BLII is characterized by a width I_BLII_2 and a thickness e_BLII_2and enables the first conductive layer 18 to be insulated from thesecond conductive layer 24 of the MIM type capacitor 4 (FIG. 6) over arow of nanopores. To ensure electrical insulation between said layers,the length of cover 141 is equal to the length of the lateral insulationstrips BLII. In addition, the width I_BLII_2 of cover 141 is equal to orgreater than the dimension I_BLII (FIG. 6) and is much greater than adistance dM1M2 corresponding to the diameter of a pore to ensureelectrical insulation between the first conductive layer 18 and thesecond conductive layer 24.

FIG. 5 presents the metal layer, placed on the etch barrier layer 10enabling nanopores to be created. This layer with a thickness e_CM12 ispreferably greater than a micrometer and preferentially is between 4 μmand 8 μm. The type of material used must be compatible with ananodization process. Thus the metal used to make this layer may bealuminum (Al) for example. Anodization is an electrolytic process takingplace in a humid environment. The principle is based on applying adifference in potential imposed between two conductive electrodesimmersed in an electrolytic solution that may be, for example, acid. Ifthe electrode is in aluminum, applying a potential to the anodeincreases the growth of alumina at its surface; consequently, itsdissolution in the acid bath causes the appearance of nanopores or holesin the metal surface.

Advantageously, thanks to the anodization process, no photolithographystep is used to create the pores. This process thus allows the methodfor producing such a structure to be optimized.

The nanopores advantageously have a diameter on the order of 50 nm andare spaced apart by 30 nm. In addition, the anodization process used inthe present invention enables nanopores opening onto the etch barrierlayer 10 of lower electrode 6 to be obtained. This characteristic isobtained by a short wet overetch of the anodized layer in a solution,for example dilute sulfuric acid. In other words, nanopores can beconsidered to be nanocylinders in which one side opens onto the etchbarrier layer 10. Advantageously, using anodization to produce capacitor4 enables a deployed surface ratio ETS on the order of 50 andpreferentially 200.

In order to produce the MIM type capacitor 4, the first conductive layer18 is then deposited on the nanostructured metal layer 12 and inside thenanopores of said nanostructured metal layer 12 as presented in FIG. 7.The first conductive layer 18 situated at the bottom of the nanopores isin contact with the etch barrier layer 10 of lower electrode 6 enablinga low access resistance R_equ to be obtained. This first conductivelayer 18 may be made by using an ALD type deposition technique, forexample. The materials used can be, for example, TiN, TaN, NiB, Ru orany other conductive material using a deposition method enablingsufficient covering power to be obtained in accordance with the needs ofthe invention.

In fact, the MIM type capacitor structure 1 preferably presents anaccess resistance named R_equ, preferentially low. This accessresistance R_equ is also controlled by the internal characteristics oflower electrode 6 and upper electrode 8, the dimensions and materials ofwhich are preferably determined to obtain a low access resistance R_equ.This first MIM capacitor 4 electrode 6 is shaped for example by aphotolithography process known from the prior art.

Dielectric layer 20 enables the capacitance between the first conductivelayer 18 and the second conductive layer 24 forming conductiveelectrodes to be created. The material used to make this dielectriclayer 20 must have the highest possible electric permittivity k in orderto maximize the value of the capacitance produced. Several types ofmaterials known as “High-k” materials, preferentially with an electricpermittivity of (k>6) can be used, such as for example, silicon nitride(Si3N4), alumina (aluminum oxide), hafnium oxide (HfO2), or any othermaterial with an electric permittivity equal to or greater than thematerials cited previously. In addition, the materials used must becompatible with the technological processes used to product the MIM typecapacitor structure 1 according to the invention.

The person skilled in the art knows that there are two parameterscontrolling the insulating effect of a layer. These two parameters arethe electric permittivity k mentioned previously and the thickness ofsaid layer. The thickness of the first dielectric layer is for examplebetween 5 nm and 80 nm (1 nm=10⁻⁹ m), preferentially it may be athickness on the order of 30 nm.

The deposition methods enabling dielectric layer 20 to be obtained canuse various techniques known to the person skilled in the art. By way ofexample, Atomic Layer Deposition (or ALD), or Low Pressure ChemicalVapor Deposition (or LPCVD) can preferentially be used.

The second conductive layer 24 as presented in FIG. 7 is then depositedon dielectric layer 20, thus enabling a MIM type capacitor 4 to becreated. The characteristics of this second conductive layer 24 as wellas the deposition methods may be identical to those used to make thefirst conductive layer 18.

The layers constituting the MIM structure comprising the firstconductive layer 18 and the second conductive layer 24 as well as thedielectric layer 20 are shaped, as illustrated in FIG. 7, for example bya photolithography process known from the prior art.

A layer of metal is then deposited to constitute the upper electrode 8as presented in FIG. 8. Upper electrode 8 is characterized by athickness whose value is for example on the order of 1 μm to 5 μm. Thevalue of the upper electrode 8 thickness is controlled (as explainedpreviously in the description) to obtain an equivalent resistance valueR_equ of the desired MIM type capacitor structure 1. The materials usedto create the upper electrode 8 may be for example aluminum (Al), copper(Cu), silver (Ag) combined or not combined with barrier metals such asfor example titanium nitride (TiN) or tantalum nitride (TaN). As thislist is not exhaustive, other materials, alone or in combination withother materials, can be deposited according to a deposition process thatis compatible with the process for producing the MIM type capacitorstructure 1 and preferably having a low electrical resistivity, can beused. Upper electrode 8 may also be made in several layers (notrepresented in the figures).

The upper lateral insulation strip BLIS is characterized by a thicknesse BLIS and a width I_BLIS as presented in FIG. 8. Upper lateralinsulation strip BLIS is constituted of an electrically insulatingmaterial such as for example silicon nitride (Si3N4) deposited forexample by using a PECVD type deposition method. Other materials as wellas other deposition methods can be used. However, compatibility with theprocess for producing the MIM type capacitor based structure 1 isnecessary.

The dimensional characteristics of the upper lateral insulation stripBLIS (FIG. 8) are equivalent to those of the lower lateral insulationstrip BLII. In addition, width I_BLIS of the upper lateral insulationstrip BLIS is much wider than the diameter d of a nanopore in order toprevent a short-circuit between the first conductive layer 18 and thesecond conductive layer 24 of the MIM type capacitor 4.

The method of producing the upper lateral insulation strip BLIS ispreferably identical to that of the lower lateral insulation strip BLII.

The second electrically insulating layer 16 is then deposited on theupper electrode 8. The material preferentially has a low electricpermittivity k in order to eliminate any short-circuit or electricalinterference noise induced. Several types of materials can be used, suchas for example, silicon nitride (Si3N4), silicon oxide (SiO2) or anyother material with an electric permittivity less than or equal to thematerials cited previously and which are compatible with thetechnological processes described in the previous paragraphs.

The second electrically insulating layer 16 as presented in FIG. 8 ischaracterized by a thickness named e_CI16, the value of which is on theorder of for example 100 nm. Deposition methods enabling such a secondelectrically insulating layer 16 to be obtained which are known to theperson skilled in the art and have already been described previouslywhen lower electrode 6 was made will not be summarized again here.

The lower lateral insulation strip BLII and the upper lateral insulationstrip BLIS respectively divide the lower electrode and the upperelectrode and thus enable distinct electrically insulated areas to becreated. For the sake of clarity of the description, the distinct areasof each electrode are subsequently named, for lower electrode 6respectively, 4Elect_inf6_1, 4Elect_inf6_2, 4Elect_inf6_3 and for upperelectrode 8 respectively 4Elect_sup8_1, 4Elect_sup8_2, 4Elect_sup8_3.FIG. 9 presents a view of these different areas.

The presence of the nanostructured metal layer 12 enables coupling onthe one hand between area 4Elect_inf6_1 of lower electrode 6 and area4Elect_sup8_1 of upper electrode 8, which will be named left lateralelectrode in the rest of the description, and on the other hand betweenthe area named 4Elect_inf6_2 of lower electrode 6 and the area4Elect_sup8_2 of upper electrode 8 that will also be named right lateralelectrode in the rest of the description. In addition, thenanostructured metal layer 12 enables coupling between area4Elect_inf6_3 of lower electrode 6 and area 4Elect_sup8_3 of upperelectrode 8 and will be named central electrode. Thus, connections ofthe MIM type capacitor 4 are formed on both sides of the MIM typecapacitor structure 1. In one embodiment, the left lateral electrode andthe right lateral electrode are coupled to one another.

In order to obtain a MIM type capacitor structure 1 with a high verticalintegratability in Z (FIG. 10), an embodiment of the invention providesfor duplicating N stages in a MIM type capacitor structure. In order tosimplify the description, an example of a MIM type capacitor structurecomposed of two (N=2) stages named E_1 and E_2 is represented in thegraph of FIG. 10. It should be noted that the method of producing Nstages is identical to the method of producing the MIM type capacitorstructure 1 and consequently it will not be described in detail in therest of the description.

The process enabling a MIM type capacitor structure according to theinvention to be made comprises:

-   -   preparation of the substrate 2,    -   deposition of a first electrically insulating layer 14 in an        insulating material,    -   the production of the first stage E_1 with the MIM type        capacitor 4,    -   the production of the second stage E_2 with the MIM type        capacitor 41.

The areas of each electrode of each stack are now named (FIG. 10) forstack E_1 comprising the MIM type capacitor 4 4Elect_inf6_1,4Elect_inf6_2, 4Elect_inf6_3 and 4Elect_sup8_1, 4Elect_sup8_2,4Elect_sup8_3. As for stack E_2 comprising MIM type capacitor 41, theyare named 41Elect_inf6_1, 41Elect_inf6_2, 41Elect_inf6_3 and41Elect_sup8_1, 41Elect_sup8_2, 41Elect_sup8_2.

Advantageously, thanks to the presence of the lateral insulation stripsof each capacitor of the stack, a left lateral electrode constituted ofarea 41Elect_sup8_1 of capacitor 41 is connected to area 41Elect_inf6_1,itself connected to area 4Elect_sup8_1 of MIM type capacitor 4 which isitself connected to area 4Elect_inf6_1. In addition, another rightlateral electrode constituted of area 41Elect_sup8_2 of capacitor 41 isconnected to area 41Elect_inf6_2, itself connected to area 4Elect_sup8_2of MIM type capacitor 4 which is itself connected to area 4Elect_inf6_2.A central electrode is constituted of area 41Elect_sup8_3 of capacitor41 and is connected to area 41Elect_inf6_3, itself connected to area4Elect_sup8_3 of MIM type capacitor 4 which is itself connected to area4Elect_inf6_3.

In an embodiment, the left lateral electrode and the right lateralelectrode are coupled to one another. This coupling between thedifferent areas of each capacitor 4, 41 thus enables parallel typecoupling to be obtained between said capacitors 4, 41. This paralleltype coupling between capacitors 4, 41 of the stack enables the valuesof each capacitor 4, 41 of the MIM type capacitor structure to be addedand thus enables a highly integrated MIM type capacitor structure to beobtained.

In addition, for a MIM type capacitor structure comprising N stacks, thevalue of the total capacitance of the MIM type capacitor structure willbe equal to the sum of the values of each capacitor 4, 41, . . . , 4N ofthe stack.

In addition, this stack enables the series resistance of the componentto be divided because the overall resistance corresponds to theindividual resistance of each element, divided by the number ofparallelized elements.

During the design of such a structure, problems with planarity mayappear between the different layers constituting said MIM type capacitorstructure. In fact, the presence of many superimposed layers may giverise to topographical discontinuities in the MIM type capacitorstructure.

In order to reduce this topographical discontinuity, adding aplanarization layer (not represented in the figures) between each stackis possible, which enables any topographical discontinuities due to thepresence of a plurality of layers on substrate 2 to be reduced. Thisplanarization layer may be deposited once the number of stages isgreater than 1.

The present invention thus enables a MIM type capacitor structure 1 witha low access resistance R_equ to be produced thanks to the contact ofthe first conductive layer 18 on the etch barrier layer 10, as well asthe paralleling of resistances of different stages, with a smallfootprint. In addition, the present invention enables, thanks to the useof upper and lower lateral insulation strips, a MIM type capacitorstructure with limited dimensions in Z and a high capacitance value persurface unit to be obtained.

In addition, the production process proposed here is compatible withmost of the processes for producing active components, which enablesintegration of a structure according to the present invention intocomplex circuits integrating passive and active components andparticularly into interconnect levels. In this way, thecapacitance/storage requirement ratio is optimized and the costs ofintegrating high value capacitor elements may be substantially reduced.

The description above was given for illustrative purposes only and isnot limiting of the scope of the invention. Any technical feasiblevariation of embodiment may be preferred to the embodiments described.In addition, the steps of the technological process described in theinvention are given for illustrative purposes and are not limited to theexamples given here. Lastly, it is understood that the variousinnovations described can be used separately or in combination,depending on the desired qualities and performance for a MIM typecapacitor structure according to the invention.

The invention claimed is:
 1. A Metal-Insulator-Metal type capacitorstructure comprising: a substrate; a first electrically insulating layerdisposed on the substrate; a lower electrode disposed on the firstelectrically insulating layer; a layer of metal disposed on the lowerelectrode and comprising a plurality of pores that are electricallyinsulated by an electrically-insulating peripheral oxide layer from astructured metal layer in which the plurality of pores are produced,said electrically-insulating peripheral oxide layer forming a poreinsulating matrix obtained by anodic etching; a capacitor ofMetal-Insulator-Metal type comprising a first conductive layer disposedon the structured metal layer and inside the pores of said structuredmetal layer, a dielectric layer covering the first conductive layer, asecond conductive layer covering the dielectric layer, wherein each porecomprises the first conductive layer and the second conductive layerseparated by the dielectric layer; an upper electrode disposed on theMetal-Insulator-Metal type capacitor; a second electrically insulatinglayer disposed on the upper electrode; wherein: the first conductivelayer disposed inside the pores of the structured metal layer is incontact with the lower electrode, the second conductive layer disposedinside the pores of the structured metal layer is in contact with theupper electrode, and the lower electrode comprises a metal layer and anetch barrier layer that is resistant to anodic etching and is disposedbetween the metal layer of the lower electrode and the pore insulatingmatrix.
 2. The Metal-Insulator-Metal type capacitor structure accordingto claim 1 further comprising: at least one lateral insulation stripdisposed in the lower electrode and dividing the lower electrode intotwo electrically distinct areas; at least one lateral insulation stripin the upper electrode and dividing the upper electrode into twoelectrically distinct areas; and a further electrical contact from thelower electrode extends to the upper electrode by the structured metallayer.
 3. The Metal-Insulator-Metal type capacitor structure accordingto claim 2, wherein the at least one lateral insulation strip comprisesan insulating material selected from the group containing silicon oxideand silicon nitride.
 4. The Metal-Insulator-Metal type capacitorstructure according to claim 1, wherein the structured metal layer ismicrostructured or nanostructured and is comprised of a metal with athickness of more than 0.4 μm.
 5. The Metal-Insulator-Metal typecapacitor structure according to claim 1, wherein the structured metallayer comprises aluminum and the pore insulating matrix comprisesalumina.
 6. The Metal-Insulator-Metal type capacitor structure accordingto claim 1, wherein the dielectric layer comprises an insulatingmaterial having a high dielectric constant k, greater than 4 (k>4) andpreferentially greater than
 10. 7. The Metal-Insulator-Metal typecapacitor structure according to claim 1, further comprising a pluralityof Metal-Insulator-Metal type capacitors stacked on each other.
 8. TheMetal-Insulator-Metal type capacitor structure according to claim 7,wherein at least two of the plurality of Metal-Insulator-Metal typecapacitors of the stack are electrically coupled in parallel.
 9. TheMetal-Insulator-Metal type capacitor structure according to claim 7,wherein the upper electrode of one of the plurality ofMetal-Insulator-Metal type capacitors of the stack is electricallyconnected to the upper electrode of another Metal-Insulator-Metal typecapacitor and the lower electrode of the one Metal-Insulator-Metal typecapacitor is electrically connected to the lower electrode of anotherMetal-Insulator-Metal type capacitor situated above the oneMetal-Insulator-Metal type capacitor.
 10. A passive or active electronicsemiconductor device comprising at least one Metal-Insulator-Metal typecapacitor structure according to claim
 1. 11. The Metal-Insulator-Metaltype capacitor structure according to claim 1, wherein the etch barrierlayer has an electrical resistivity, such that there is electricalcontinuity between the first conductive layer and the lower electrode.12. The Metal-Insulator-Metal type capacitor structure according toclaim 1, further comprising: at least one additional capacitor ofMetal-Insulator-Metal type stacked on the capacitor ofMetal-Insulator-Metal type, the at least one additional capacitorincluding: an additional first conductive layer disposed on anadditional structured metal layer and inside pores of said additionalstructured metal layer, an additional dielectric layer covering theadditional first conductive layer, an additional second conductive layercovering the additional dielectric layer, wherein each pore comprisesthe additional first conductive layer and the additional secondconductive layer separated by the additional dielectric layer, whereinthe additional first conductive layer disposed inside the pores of theadditional structured metal layer is in contact with the upper electrodeto form at least two stages for the Metal-Insulator-Metal type capacitorstructure.
 13. A method for producing a Metal-Insulator-Metal typecapacitor structure, the method comprising: a. preparing a substrate; b.depositing a first electrically insulating layer of an insulatingmaterial on the substrate; c. producing a lower electrode on the firstelectrically insulating layer, the lower electrode being produced bydepositing a layer of metal on the first electrically insulating layerand covering said deposited metal layer by an etch barrier layer that isresistant to anodic etching; d. performing localized etching of thelower electrode and depositing an electrically insulating material inthe localized etching of the lower electrode; e. depositing a metallayer on the lower electrode; f. structuring pores in the metal layer byusing an anodic etching process, said pores being electrically insulatedby an electrically-insulating peripheral oxide layer from a structuredmetal layer in which the plurality of pores are produced, saidelectrically-insulating peripheral oxide layer forming a pore insulatingmatrix; g. successively depositing a first conductive layer, adielectric layer and a second conductive layer on the structured metallayer and in the pores of said structured layer; h. producing an upperelectrode placed on the second conductive layer; i. performing localizedetching of the upper electrode and depositing an electrically insulatingmaterial in the localized etching of the upper electrode; and j.depositing a second electrically insulating layer of an insulatingmaterial on the upper electrode.
 14. The method according to claim 13,wherein the structured metal layer is formed of aluminum and the poreinsulating matrix formed by anodic etching is formed of alumina.
 15. Themethod for producing a Metal-Insulator-Metal type capacitor structureaccording to claim 13, wherein: step d) comprises producing a lowerlateral insulation strip by said localized etching of the lowerelectrode, defining two electrically insulated areas in the lowerelectrode, after the production of said lower electrode, and step i)comprises producing an upper lateral insulation strip by said localizedetching of the upper electrode, defining two electrically insulatedareas in the upper electrode, after the production of said upperelectrode.
 16. The method for producing a Metal-Insulator-Metal typecapacitor structure according to claim 15, wherein steps c) through j)are repeated N times.
 17. The method for producing aMetal-Insulator-Metal type capacitor structure according to claim 16,further comprising depositing a planarization layer after at least onestep i).
 18. The process for producing a Metal-Insulator-Metal typecapacitor structure according to claim 13, wherein step c) comprisesdepositing as said etch barrier layer a layer having an electricalresistivity, such that there is electrical continuity between the firstconductive layer and the lower electrode.